AIP-300

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Automatic 300mm CMP System.
- Dry-in, Dry-Out
- Process Performance
- High grade CMP process
- Advanced carrier with 5zone pressure control
- Customized wafer flow sequence per chamber
Hardware Performance
- 2-Cassette FOUP
- 2-Wafer transfer robot
- 2-Monitor panel
- 1-Platen+1Head
- 2-Chemical unit, double side brush clean