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以踏實的腳步穩健經營,使本公司擁有穩固的發展利基。

逸典科技專注於半導體產業CMP的相關事項,服務項目: CMP設備、CMP相關二手設備、Slurry、Pad、Edge Polisher機台、CMP製程開發、Robot維修服務。公司成員來自於相關產業界,以專業的服務團隊來提供客戶滿意的產品與售後服務。

PRODUCTS

商品介紹

Fine Surface E-...

Fine Surface E-300 Type II

Fine Surface E-...

BBS Edge polish tools.
Dry-in/Dry-out
300 mm wafer process

Fine Surface E-...

BBS Edge Polish Tools
300 mm

Brush LDM Retro...

Brush LDM Retrofit

UPA Relocation

UPA relocation

Contour Head

Reflexion 300 Contour head

wearing

776

EHPM-200/300

Offline to Measure pressure of mirra head 200/300. Keep watch out a period of time.

ES-200i

Pick up wafer from cassette, then put wafer to any plate or measurement's stage. Simple interface.

ES-300TB

Pick up wafer from FOUP, then put wafer to any kind of stage.
Manual open FOUP door. auto pick up w...
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